Carbon fiber composite transfer member with reflective surfaces

ABSTRACT

A method of transporting precision equipment materials without absorption of thermal energy through the heat sensitive material or device such as flat panel displays. The transfer member has a carbon fiber reinforced composite material body with a layer of metal film on the top and bottom surfaces of the transfer member that provides a reflective surface. Flat panel displays, for example, release radiant thermal energy that is absorbed by the carbon fiber reinforced composite which is detrimental to the flat panel display. The reflective surface created by the metal film prevents the energy absorption by the carbon fiber reinforced composite. A glass fiber and epoxy layer on the metal film surface protects the metal film.

This application claims the benefit of U.S. Provisional Application No.60/399,337, filed Jul. 29, 2002.

FIELD OF THE INVENTION

The present invention relates to a transfer member. More particularly,the present invention relates to a carbon fiber composite transfermember with reflective surfaces that is suitable for transferring flatpanel displays without energy absorption.

BACKGROUND OF THE INVENTION

The following disclosures may be relevant to various aspects of thepresent invention and may be briefly summarized as follows:

In U.S. Pat. No. 6,194,081 B1 to Kingston describes a method ofpreparing a beta titanium-composite laminate for use predominantly inaircraft structures. The beta titanium-composite laminate comprises afirst layer of beta titanium alloy having a certain yield strength tomodulus of elasticity ratio and adhering a first layer of compositehaving a certain strength to modulus of elasticity ratio to the layer ofbeta titanium alloy, thereby forming a beta titanium-composite laminate,where the yield strength to modulus of elasticity ratio of the firstlayer of beta titanium alloy matches the strength to modulus ofelasticity ratio of the first layer of composite such that the firstlayer of beta titanium alloy will reach its stress limit and the firstlayer of composite will reach its stress limits at about the same totalstrain.

In U.S. Pat. No. 5,866,272 to Westre et al. discloses a hybrid laminateand skin panels of hybrid laminate structure that are suitable for asupersonic civilian aircraft. The hybrid laminates include lay-ups oflayers of titanium alloy foil and composite plies, that are optimallyoriented to counteract forces encountered in use and are bonded to acentral core structure, such as titanium alloy honeycomb. Thereinforcing fibers of the composite plies are selected from carbon andboron, and the fibers are continuous and parallel oriented within eachply. However, some plies may be oriented at angles to other plies.Nevertheless, in a preferred embodiment of the invention, a substantialmajority of, or all of, the fibers of the hybrid laminates are orientedin a common direction. The outer surfaces of the laminates include alayer of titanium foil to protect the underlying composite-containingstructure from the environment, and attack by solvents, and the like.

U.S. Pat. No. 4,888,247 to Zweben et al. discloses heat conductinglaminates and laminated heat conducting devices, having at least onelayer of metal and at least one layer of polymer matrix compositematerial having low-thermal-expansion reinforcing material distributedthroughout and embedded therein. The coefficient of thermal expansionand the thermal conductivity of the laminated heat conducting devicesare defined by the metal in combination with the polymer matrix materialand low-thermal-expansion reinforcing material in the laminate. Thecoefficient of thermal expansion and thermal conductivity of a heatconducting device can be controlled by bonding at least one layer ofmetal to at least one layer of polymer matrix composite material havinglow-thermal-expansion reinforcing material distributed throughout andembedded therein. In one embodiment, the laminated heat conductingdevice comprises a plurality of alternating layers of aluminum and epoxyresin having graphite fibers distributed throughout the epoxy resin.

U.S. Pat. No. 3,939,024 to Hoggatt discloses structural reinforcedthermoplastic laminates capable of supporting loads in at least twodirections and containing by volume about 45% to 65% fiberreinforcement. The laminates can be used with or without metal cladding.

In the manufacturing processes of precision devices, such as flat paneldisplay devices and semiconductors, a transfer member for transferringthese components is used. Such a transfer member may be installed in adevice such as an industrial robot for moving precision devices. Thecomponents are placed or held on the transfer member and moved to thedesired location. In flat panel display manufacturing, for example, hightemperature displays are transferred between process steps by automaticrobotics. These robots have end effectors (e.g. support arms) that liftand provide a resting place for the display panels during theirtransport. Ceramic and aluminum have historically been used as the endeffector material due to their stiffness and purity levels. Recently,CFRP (carbon fiber reinforced plastic) has been introduced as endeffectors because of their stiffness, cost and vibration dampingproperties have been desirable. However, CFRPs are black in color andabsorb radiant thermal energy from the display panel during transportwhich is detrimental to flat panel displays because too much heattransfer can damage the flat panel display or other heat sensitivematerial. This feature limits the market of CFRP end effectors in flatpanel display manufacturing were it is important not to absorb radiantthermal energy.

It is desirable to provide a transfer member (e.g. support arms or endeffectors) that prevents energy absorption by the CFRP, such as for flatpanel display transport.

SUMMARY OF THE INVENTION

Briefly stated, and in accordance with one aspect of the presentinvention, there is provided a method for transporting a device that hasa surface that absorbs radiant thermal energy which comprises the stepof using a transporting member comprising:

a) a body having a carbon-fiber reinforced composite material, said bodyhaving a top surface and a bottom surface;

b) a metal film covering the top and bottom surfaces of the compositebody, said film forming a reflective surface; and

c) a glass fiber epoxy resin forming a layer on the metal film coveringthe top surface and the bottom surface of the body.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be more fully understood from the following detaileddescription, taken in connection with the accompanying drawings, inwhich:

FIG. 1 shows a top view of an end effector or support arm used fortransport in the present invention;

FIG. 2 shows cross-sectional view of the layers of the transfer memberin the present invention;

FIG. 3 shows a top view showing another example of the transfer member;and

FIG. 4 shows a cross-sectional view of the transfer member (i.e. endeffector, support arm, body) is cut by a vertical section, including itslongitudinal direction.

While the present invention will be described in connection with apreferred embodiment thereof, it will be understood that it is notintended to limit the invention to that embodiment. On the contrary, itis intended to cover all alternatives, modifications, and equivalents asmay be included within the spirit and scope of the invention as definedby the appended claims.

DETAILED DESCRIPTION OF THE INVENTION

The present invention is a transfer member that provides a reflectivesurface that prevents energy absorption by the carbon fiber-reinforcedplastic used in end effectors or support arms to transport precisiondevices that include flat panel displays and semi-conductors. In hightemperature displays precision devices such as flat panel displays andsemi-conductors are transferred between process steps by automaticrobotics.

The carbon-fiber-reinforced composite material of the transfer memberbody includes at least one layer of a unidirectional prepreg in whichcarbon fibers are arranged essentially parallel with the longitudinaldirection of the body. The carbon-fiber-reinforced composite material ofthe body includes at least one layer of a cloth prepreg containingcarbon fibers, with at least part of the carbon fibers of the prepregand the electroconductive polymer part being electrically connected. Inthe present invention, each layer of the composite body preferablyranges from about 0.02 mm to about 1.00 mm in thickness.

The carbon-fiber-reinforced composite material of the transfer memberincludes: a carbon-fiber-reinforced plastic (CFRP) and acarbon-fiber-reinforced carbon composite material (C/C compositematerial). The CFRP material is preferred. The matrix material of thecarbon-fiber-reinforced composite material comprises: a thermosettingpolymer, a thermoplastic polymer, carbon, ceramic, metal, and mixturesthereof. In the present invention, a thermosetting polymer, carbon, or amixture thereof is preferable as the matrix. A thermosetting polymerincludes: an epoxy, aramid, bismaleimide, phenol, furan, urea,unsaturated polyester, epoxy acrylate, diallyl phthalate, vinyl ester,thermosetting polyimide, melamine, and other such materials.

The thermoplastic polymer matrix material for the present inventionincludes: polyimide resin, nylon, liquid aromatic polyamide, polyester,liquid aromatic polyester, polypropylene, polyether sulfone polymer,polyphenylene sulfide, PEEK (polyether ether ketone), PEK(polyetherketone) PEKK (polyether ketone ketone), LCP (liquid crystalpolymer), polysulfone, polyvinyl chloride, vinylon, aramid,fluoropolymer, and other such materials. The ceramic matrix material forthe present invention includes: alumina, silica, titanium carbide,silicon carbide, boron nitride, silicon nitride, and other suchmaterials. Metal matrix materials for the present invention include:titanium, aluminum, tin, silicon, copper, iron, magnesium, chromium,nickel, molybdenum, tungsten, and alloys containing one or more of thesemetals.

The carbon fibers included in the above-mentionedcarbon-fiber-reinforced composite material comprise: petroleumpitch-type carbon fibers, coal pitch-type carbon fibers,polyacrylonitride (PAN) carbon fibers, and other such fibers. Theelectric resistivity of the carbon fibers is normally from 1-30 μΩ·m,and preferably 1-20 μΩ·m. The carbon-fiber-reinforced composite materialmay include only one kind of carbon fibers and can also include a hybridstructure of two or more kinds of these carbon fibers.

The form of the carbon fibers used in the carbon-fiber-reinforcedcomposite material include one-dimensional reinforcing, two-dimensionalreinforcing, three-dimensional reinforcing, random reinforcing, andsimilar forms are appropriately selected and adopted in accordance withthe desired purpose of the transfer member. For example, the carbonfibers may be in the form of short fibers, woven fabric, nonwovenfabric, unidirectional material, two-dimensional woven fabric, andthree-dimensional woven fabric as desired. More specifically, the carbonfibers may be used in a material with the structure of felt, mat,braided fabric (i.e. nonwoven fabric comprising carbon fibers arrangedin parallel crosses or triangular form with hot-melt polymer),unidirectional material, pseudo-isotropic material, plain fabric, satin,twilled fabric, pseudo thin fabric, entangled fabric, etc., laminatedand then can be installed in the above-mentioned carbon-fiber-reinforcedcomposite material.

The electroconductive polymer part is electrically connected to at leastpart of the carbon fibers in the body. The body makes contact with thearticle when the article is transferred. A portion of theelectroconductive polymer part is in contact with the transferredarticle placed thereon. The contact, between the article and the body,is electrically connected to the electroconductive polymer part via thecarbon fibers. The present invention further provides contact to agrounding conductor.

The electroconductive polymer part includes a polyimide polymer. In thepresent invention, the polymer material has electrical conductivity. Forexample, a polymer material in which an electroconductive filler isadded to a thermosetting or thermoplastic polymer. Other materials forthe above-mentioned polymer material include: a fluoropolymer, PAI(polyamideimide), PA (polyamide), PEI (polyetherimide), POM(polyoxymethylene), PEEK (polyetheretherketone, PEKK(polyetherketoneketone), PEK (polyetherketone), polyacetate, nylonpolymer, aromatic polyimide, polyethersulfon (PES), polyimide,polyetherimide, polyester, liquid crystal polymer (LCP),polybenzimidazole (PBI), Poly(paraphenylene benzobisaxazole) (PBO),polyphenylene sulfide (PPS), polycarbonate (PC), polyacrylate,polyacetal, or mixture of two or more thereof. Other electroconductivefillers for use in the present invention include: metal powders, carbonblack, carbon fibers, zinc oxide titanium oxide, potassium titanate. Itis preferable, that the polymer material contain a polyimide that hasexcellent abrasive resistance, antistatic property and chemicalresistance; has dimensional stability and mechanical processability formanufacturing a transfer member; and does not easily damage articlessuch as glass substrates or wafers when making contact with them; anddoes not easily generate particles.

In the present invention, the volume resistivity of theelectroconductive polymer part normally ranges from 10¹-10¹² Ω·cm, andpreferably from 10⁴-10⁵ Ω·cm. Additionally, a manufacturing method formaking the transfer member may include preparing a transfer member bodycontaining a carbon-fiber-reinforced composite material. The processexposes a portion of the carbon fibers of the composite material, and anelectroconductive polymer part is installed on the transfer member bodysuch that it can be electrically connected to the exposed carbon fibers.The electroconductive polymer part is installed by bonding the transfermember body and the electroconductive polymer part with anelectroconductive adhesive. The manufacturing method for installation ofthe electroconductive polymer part comprises inserting theelectroconductive polymer part into a hole or concave part. The hole andconcave part are formed in a way to expose the internal carbon fibers ofthe composite material. Another aspect of the present invention is themethod of manufacturing a transfer member with electric conductivity. Amethod for manufacturing the carbon-fiber-reinforced composite materialsuch as CFRP and C/C composite material known in the art can be used.For example, the CFRP can be prepared by forming a prepreg byimpregnating reinforcing carbon fibers with a thermosetting polymer,then laminating and curing them. However, it is preferable to obtain theCFRP with a prescribed elastic modulus by laminating the prepreg ofunidirectional reinforcing carbon fibers, that is, unidirectionalprepreg so that the direction of the fibers is 0° and 90°, 0°, +45°, and90° or 0°, +60°, and 90° with respect to the longitudinal direction ofthe transfer part.

In the impregnation of the reinforcing carbon fibers into thethermosetting polymer, a hot-melt method, that usually heats the polymerto 60-90° C. and impregnates it on the reinforcing fibers, is preferablyapplied. The content of the thermosetting polymer in the prepregmanufacture is usually 20-50 wt %, and preferably 25-45 wt %, relativeto the total weight of the reinforcing fibers.

If necessary, a filler can be added to the polymer constituting theprepreg. The filler material includes: mica, alumina, talc, finepowder-shaped silica, wollastonite, sepiolite, basic magnesium sulfate,calcium carbonate, polytetrafluoroethylene powder, zinc powder, aluminumpowder, and organic fine particles such as fine acryl particles, fineepoxy polymer particles, fine polyamide particles, and fine polyurethaneparticles and other such materials or a combination of two or more ofany of the above. The prepreg is laminated in an appropriate shape onthe transfer part and heated and cured at 110-150° C. for 30 min-3 hr inan autoclave or by a press, so that the CFRP can be obtained. With sucha method, CFRP with stable qualities and little voids can be obtained.

The C/C composite material can also be manufactured by a known method.For example, carbon fibers are used in a form similar to the carbonfibers used for the CFRP manufacture described above. A preform (i.e. ashape formed at an intermediate step of the process) is formed byimpregnating the preform into a matrix polymer such as a thermoplasticpolymer and thermosetting polymer, then carbonized by a hot isostaticprocess (i.e. HIP) treatment or similar method so that the carbonizedmatrix can be formed on the carbon fibers. Carbonization can be carriedout by heating the preform as described above at 500° C., preferably,300° C., in an inert gas.

The C/C composite includes a pitch substance such as those using coalpitch, petroleum pitch, synthetic pitch, isotropic pitch, and meso-phasepitch as raw materials. Also a thermoplastic polymer that may include:polyimide resin, phenol polymer, epoxy polymer, furan polymer and ureapolymer and a thermosetting polymer comprises phenol polymer, epoxypolymer, furan polymer, urea polymer and other such materials.

The pitch, thermosetting polymer, or thermoplastic polymer can also bemixed with a filler and provided to the process for forming the matrix.Examples of filler material include: carbon powders, graphite powders,silicon carbide powders, silica powders, carbon fiber whiskers, carbonshort fibers, and silicon carbon short fibers.

Another example of the method for manufacturing the C/C compositematerial, is forming a matrix by attaching a thermally decomposablecarbon to carbon fibers using chemical vapor deposition (CVD), chemicalvapor infiltration (CVI), or such similar process creating the C/Ccomposite material can be prepared. The C/C composite material obtainedin this manner can be further subjected to a miniaturization treatment.In particular, the density of the composite material can be improved byrepeating the matrix forming process.

The body of the transfer member of the present invention may be formedfrom just the carbon-fiber-reinforced composite material or, from thecombination of the carbon-fiber-reinforced composite fiber and othermaterials such as a glass fiber reinforced plastic (GFRP). The othermaterials include structures such as a honeycomb, a porous body, or acorrugated plate.

The body can be prepared by subjecting the molded body, containing thecarbon-fiber-reinforced composite material obtained using the methoddescribed above, to a process such as cutting the body to the desiredshape. With such processing, the body having the desired form can beobtained with accurate working precision. Furthermore, an electricalconnection of the carbon fibers and the electroconductive polymer partcan be easily achieved as will be described subsequently. And, ifnecessary, the body can have coating agents applied to prevent particlegeneration from the working surface. A thermosetting polymer such as anepoxy polymer and silicone wax can be used as the coating agent.

An example of the transfer member body of the present invention is anoblong plate-shaped structure with skin layers positioned on bothsurfaces of the plate and a core layer positioned between the skinlayers. The top and bottom surfaces of the structure are covered with anepoxy coated, metal film forming a reflective surface. As mentionedabove, each skin layer of the transfer member body preferably rangesfrom about 0.02 mm to about 1.00 mm in thickness. The skin layers have afirst carbon-fiber-reinforced composite material layer containing carbonfibers, that are oriented at an angle of −20° to +20° with respect tothe longitudinal direction of the transfer part and have a tensileelastic modulus of 500-1,000 GPa. The second layer is acarbon-fiber-reinforced composite material layer containing carbonfibers, that are oriented at an angle of +75° to +90° and/or −75° to−90° with respect to the longitudinal direction of the transfer part andhave a tensile elastic modulus of 200-400 GPa. The skin layers have athird carbon-fiber reinforced composite fiber that is oriented at anangle of +30° to +60° and/or −30° to −60° with respect to thelongitudinal direction of the transfer part and has a tensile elasticmodulus of 500-1,000 GPa. The ratio of the thickness of the three skinlayers to the total thickness of the skin layers and the core layer is20-80%, preferably 60-80%. The contact can be electrically connected tothe polymer electroconductive part via carbon fibers of the skin layers.Also the core layer, in addition to or instead of, the above-mentionedthird skin layer of carbon-fiber-reinforced composite material, mayinclude another material layer with a structure such as a honeycomb,porous body, and/or a waved plate (corrugated) and voids may also beused. A cloth layer made of fibrous materials such as carbon fibers, canbe disposed on the outermost surface of the body making it easier toprocess the transfer members than if the cloth layer was not present.And, if the cloth layers are made of carbon fiber, the electronicconnection between the contact and electroconductive polymer partbecomes easier.

An embodiment of the transfer member of the present invention includes abody having a carbon-fiber-reinforced composite material and anelectroconductive polymer part being electrically connected to at leastpart of the carbon fibers in the body and having a portion for contactwith a transferred article by placing it on the body. The area where thetransfer member makes contact with the article may be the surface of thedistal end of the transfer member, and the electroconductive polymerpart.

The electrical connection of the electroconductive polymer part with atleast part of the carbon fibers of the body can be achieved by: exposinga portion of the carbon fibers of the carbon-fiber-reinforced compositematerial contained in the body, and installing the electroconductivepolymer part on the body so that it can be electrically connected withthe carbon fibers exposed. The carbon fibers may be exposed by formingthe transfer member body as a molded body containing thecarbon-fiber-reinforced composite material and forming a hole or concavepart by cutting a portion thereof. (e.g. Normally, when a molded bodycontaining a carbon-fiber-reinforced composite material is manufactured,its surface is coated with a matrix, and the carbon fibers are notexposed. Thus, if a portion of the body is cut, the carbon fibers areexposed.) In addition to the carbon fiber layer, the metal and the glassfiber epoxy layer as shown in FIG. 4 would also have to be similarly cutand exposed. The glass fiber epoxy resin layer comprises a combinationof glass fiber material and epoxy resin material. The glass fibermaterial includes S-glass, E-glass, and D-glass and examples of epoxyresin materials include condensation products of epichlorohydrin andbisphenol-A.

The electrical connection of the exposed carbon fibers and theelectroconductive polymer part may occur by bonding the body and theelectroconductive polymer part with an electroconductive adhesive at adifferent portion of the electroconductive polymer part then the portionfor contact with a transferred article on the surface of the bodycontaining the cut surface or by inserting the electroconductive polymerpart into the hole or concave part formed in the process for exposingthe carbon fibers of the body. However, a method for bonding the bodyand the electroconductive polymer part is not critical, any method inwhich the electroconductive polymer part can be electrically connectedwith at least part of the carbon fiber forming the body and anotherportion where a transferred article may be placed in contact therewithmay be used.

The transfer part of the present invention may be equipped with only oneelectroconductive polymer part or with several electroconductive polymerparts. When several electroconductive polymer parts are used, one ormore of them can be electrically connected to the carbon fibers.

The transfer part of the present invention can be further equipped witha contact to a grounding conductor. The above-mentioned contact iselectrically connected with the electroconductive polymer part via atleast part of the carbon fibers, so that the static electricity of anarticle making contact with the electroconductive polymer part can beremoved by the grounding method. The above-mentioned contact may besimply that of the exposed surface of the carbon fibers formed bycutting of the body or it may also be a desired metal electrode.

The shape of the transfer part of the present invention can be oblong asmentioned above, however, a variety of shapes including a plate shape,rod shape, fork shape, honeycomb shape, hollow rod shape, T shape, Ishape, curved surface shape, or a combined shape can also be adopted foruse in the present invention. Typically, the transfer member of thepresent invention can have an area in contact with the transferredarticle at its distal end or can have the contact at its proximal end.The transfer member of the present invention may have a shape in whichonly the electroconductive polymer part makes contact with thetransferred article and supports it or, a shape in which both theelectroconductive polymer part and the body make contact with thetransferred article and support it. The proximal end is fixed to adevice for moving the transfer member such as an industrial robot. Thedevice is operated such that the article being transferred may be placedor held at the distal end to enable transfer of the article.

Reference is now made to the drawings for a detailed description of thepresent invention. Examples of the transfer member of the presentinvention are explained below in reference to the Figures. Reference isnow made to the drawings for a detailed description of the presentinvention. FIG. 1 shows a topical view of an embodiment of the presentinvention where an end effector or support arm or body 10 has afork-shaped structure. The body 10 has a portion 20 of the transfermember that holds the article (e.g. precision device) being transferred.The handle portion 25 is attached to the article holding portion 20. Thebody 10 is formed from a core material such as a carbon fiber compositematerial and then additional layers as described in FIG. 2.

In the body 10, part or all of the carbon fibers are arrangedessentially parallel with the longitudinal direction, that is, thedistal position-proximal position direction of the body 10. Anelectroconductive polymer part 22 is mounted at a position shown in FIG.1, so that it is electrically connected to a contact 26 via the carbonfibers. The grounding conductor 24 is connected to the contact 26 inremoving the current (i.e discharging the static electricity).

The body of the present invention is made up of layers shown in thecross-sectional view of a portion of the body. The body 10 (see FIG. 1)is composed of layers that include: a carbon fiber composite layer 50that has a top surface 51 and a bottom surface 52. A metal film 61, 62is applied to the top surface 51 and the bottom surface 52,respectively, of the carbon-fiber reinforced plastic material 50. Themetal film 61, 62 includes at least one of the following: titanium,copper, aluminum, steel, gold, silver, nickel, tin, and/or combinationsthereof. This metal film 61, 62 provides the reflective surface thatprevents energy absorption by the CFRP during transport in the presentinvention. This is particularly useful for the transport of precisiondevices such as flat panel displays and other such devices in whichenergy absorption by the transport material can occur. This metal film61, 62 is preferably titanium.

A glass fiber epoxy resin layer 71, 72 is applied to the metal film 61(top surface layer) and 62 (bottom surface layer), respectively. (Theglass fiber expoxy resin layers 71, 72 are applied to opposite sides ofthe metal film 61 and 62 than those sides in contact with thecarbon-fiber reinforced plastic material 50.) The translucent layer ofthe glass fiber and epoxy layer provide see through and protective fiberfor the metal film. The composite layers shown in FIG. 2 of the presentinvention will not absorb thermal energy and can be utilized as endeffectors in the transport of temperature sensitive flat panel displays.The carbon-fiber-reinforced composite layer of the body includes a nonpurity of less than 30 ppm, preferably less than 15 ppm water and lessthan 5 ppm, preferably less than 1 ppm hydrogen gas being evolved at avacuum of 10-5 Pa, having a temperature condition of from 25° C. to 250°C. at a ramp up rate of 10° C./minute.

Reference is now made to FIG. 3, which shows a top view of anotherembodiment of the transfer member of the present invention. A body 31has a fork-shaped structure, and an electroconductive polymer part 32 ismounted in each of its branched ends. The body 31 is formed bylaminating cloth prepreg sheets. In the body 31, carbon fibers in thecloth prepregs are crossed and extended in the longitudinal directionand the width direction of the transfer member body 31. Therefore, theelectroconductive polymer part 32 is electrically connected to a contact36 via said carbon fibers, and in transferring an article, the articlemakes contact with the electroconductive polymer part 32, so that acurrent flows in the arrow direction 33, thereby removing the current(i.e. discharging the static electricity). The grounding conductor 34 isconnected to the contact 36 in a similar manner as described in FIG. 1.

FIG. 4 is a cross section in which the transfer member is cut by avertical section, including its longitudinal direction. The body 11 hasan oblong plate shape, and is formed of a carbon-fiber-reinforcedcomposite material, and has a concave part 15 on the upper surface ofits distal end. The concave part 15 is produced by forming a molded bodycomposed of a carbon-fiber-reinforced composite material and cuffing itin the shape shown. An electroconductive polymer part 12 has a convexpart fitting into the concave part 15 and is mounted in the body 11 viaan electroconductive adhesive or by press-fitting it into the concavepart 15. At the proximal end of the body 11, a contact 16 to a groundingconductor 14 is installed and connected to the grounding conductor 14.In actual use, the contact 16 may be directly connected to the groundingconductor 14 or may also be grounded via a device such as an industrialrobot for moving the transfer member. The contact 16 can also have astructure fitted to each ground shape. The body 11 is formed bylaminating unidirectional prepreg sheets. In the body 11, part or all ofthe carbon fibers of composite layer 50 are arranged substantiallyparallel with the longitudinal direction of the body 11, that is, in thedistal position to proximal position direction. Thus, theelectroconductive polymer part 12 and the contact 16 are electricallyconnected via the carbon fibers of the body 11, and in transferring anarticle, the article makes contact with the electroconductive polymerpart 12, so that a current flows in the arrow 13 direction, therebyremoving the current.

The transfer member of the present invention comprises a body comprisinga carbon-fiber-reinforced composite material and an electroconductivepolymer part being electrically connected to at least part of the carbonfibers in said body and having a portion for contact with a transferredarticle by it being placed on, can improve transferability of atransferred article such as silicon wafer for semiconductor and liquidcrystal glass substrate by a transfer member, suppress damage to thetransferred articles caused by a transferring environment and be easilymanufactured, and has lightness, high stiffness, and high heatresistance due to the body containing a fiber reinforced compositematerial and the electroconductive polymer part associated with thebody, in addition, can effectively remove the static electricity of anarticle by the grounding method. Therefore, components such aslarge-scale glass substrates, flat panel displays and wafers, whichrequire an accurate operation, can be favorably transferred withoutlowering their qualities and yield. Thus, the transfer part is veryuseful in a similar manner as described in FIG. 1. In transferring anarticle, the article makes contact with the electroconductive polymerpart 32, so that a current flows in the arrow direction 33. Also, in themethod for manufacturing the transfer member of the present invention,the above-mentioned transfer part can be manufactured in a simplemanner.

It is therefore, apparent that there has been provided in accordancewith the present invention, a transfer member with reflective surfacesthat fully satisfies the aims and advantages hereinbefore set forth.While this invention has been described in conjunction with a specificembodiment thereof, it is evident that many alternatives, modifications,and variations will be apparent to those skilled in the art.Accordingly, it is intended to embrace all such alternatives,modifications and variations that fall within the spirit and broad scopeof the appended claims.

1. A method for transporting a device to prevent radiant thermal energyabsorption by a surface which comprises the step of using a transportingmember comprising: a) a body having a carbon-fiber reinforced compositematerial, said body having a top surface and a bottom surface; b) ametal film covering the top and bottom surfaces of the composite body,said film forming a reflective surface; and c) a glass fiber epoxy resinforming a layer on the metal film covering the top surface and thebottom surface of the body.
 2. The method of claim 1, wherein the glassfiber epoxy resin layer provides a protective cover for the metal filmon the top and bottom surfaces of the body.
 3. The method of claim 1,wherein the reflective surface prevents the absorption of thermal energyby a heat sensitive material or device.
 4. The method of claim 3,wherein the device is a flat panel display.
 5. The method of claim 1 or3, wherein the metal film comprises at least one of titanium, copper,aluminum, steel, gold, silver, nickel, tin, and combinations thereof. 6.The method of claim 1, wherein said carbon-fiber-reinforced composite ofsaid body comprises a non purity of less than 30 ppm water and less than5 ppm hydrogen gas being evolved at a vacuum of 10-5 Pa, having atemperature condition of from 25° C. to 250° C. at a ramp up rate of 10°C./minute.
 7. The method of claim 1, wherein said glass fiber epoxyresin comprises a combination of a glass fiber material and an epoxymaterial.
 8. The method of claim 7, wherein said glass fiber material isselected from the group of S-glass, E-glass, and D-glass.
 9. The methodof claim 7, wherein said epoxy resin material comprises condensationproducts of epichlorohydrin and bisphenol-A.
 10. The method of claim 1,wherein the transfer member comprises three layers forming a compositebody and each layer of the composite body preferably ranges from about0.02 mm to about 1.00 mm in thickness.